JPH02102728U - - Google Patents
Info
- Publication number
- JPH02102728U JPH02102728U JP1161389U JP1161389U JPH02102728U JP H02102728 U JPH02102728 U JP H02102728U JP 1161389 U JP1161389 U JP 1161389U JP 1161389 U JP1161389 U JP 1161389U JP H02102728 U JPH02102728 U JP H02102728U
- Authority
- JP
- Japan
- Prior art keywords
- phase growth
- vapor phase
- vapor
- raw material
- growth chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 12
- 239000002994 raw material Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 1
- 229910052753 mercury Inorganic materials 0.000 claims 1
- 239000012159 carrier gas Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1161389U JPH02102728U (en]) | 1989-02-02 | 1989-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1161389U JPH02102728U (en]) | 1989-02-02 | 1989-02-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102728U true JPH02102728U (en]) | 1990-08-15 |
Family
ID=31220322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1161389U Pending JPH02102728U (en]) | 1989-02-02 | 1989-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102728U (en]) |
-
1989
- 1989-02-02 JP JP1161389U patent/JPH02102728U/ja active Pending